Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology
نویسندگان
چکیده
Nowdays there is an increasing requirement for magnetic devices with improved sensitivity and resolution, trying to keep as low as possible their cost and power consumption. Additionally there is the need to develop compact devices with several sensors able to measure different parameters including magnetic field, pressure, temperature, acceleration. In this way a multifunctional device could be integrated on the same substrate containing transducers and electronic circuits in a compact configuration without affecting device performances.
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